ACLS 简况
Axcelis Technologies, Inc. designs, manufactures and services ion implantation and other processing equipment used in the fabrication of semiconductor chips. The Company also provides aftermarket lifecycle products and services, including used tools, spare parts, equipment upgrades, maintenance services and customer training. The Company offers a complete line of high energy, high current and medium current implanters for all application requirements. The Company's Purion XE high energy system combines its radio frequency (RF) Linac high energy, spot beam technology with the Purion platform. The Company also offers the Purion M medium current system. The Company's Purion M systems also offer differentiation for specialty applications, such as hot silicon carbide. The Company's Purion H high current system is extendable into ultra-low energy applications to satisfy future process requirements, including leakage current performance.
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