Xanadu expands Mitsubishi Chemical collaboration on quantum EUV lithography simulations under Canada-Japan support

PUBT · 3d ago
Xanadu expands Mitsubishi Chemical collaboration on quantum EUV lithography simulations under Canada-Japan support
  • Xanadu Quantum Technologies entered a new phase of collaboration with Mitsubishi Chemical on quantum-driven semiconductor fabrication research focused on EUV lithography.
  • Project targets radiation-induced blur in EUV photoresists, aiming to integrate quantum simulation outputs into Mitsubishi’s multiscale models to predict blur.
  • Planned outcome is an FTQC-ready software pipeline to identify resist materials that reduce blurring for next-generation chip manufacturing.
  • Work is backed by Canada’s NRC IRAP program, which has provided Xanadu advisory services and more than $800,000 in prior funding.
  • Japan support comes from the Strategic Innovation Promotion Program led by AIST, including G-QuAT, to scale the partners’ earlier EUV modeling results.


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