At the 8th Expo, semiconductor equipment supplier ASML showcased some of its panoramic lithography products and technologies. Among them, DUV lithographs include TWINSCAN XT: 260 and TWINSCAN NXT: 870B. The reporter learned that the TWINSCAN XT: 260 is ASML's first lithography system that can serve the field of advanced packaging. It has a large field of view and exposure, which can increase production efficiency by 4 times compared to existing models; the TWINSCAN NXT:870B can produce more than 400 wafers per hour with the support of upgraded optical devices and the latest generation of maglev platforms.

Zhitongcaijing · 11/07/2025 12:57
At the 8th Expo, semiconductor equipment supplier ASML showcased some of its panoramic lithography products and technologies. Among them, DUV lithographs include TWINSCAN XT: 260 and TWINSCAN NXT: 870B. The reporter learned that the TWINSCAN XT: 260 is ASML's first lithography system that can serve the field of advanced packaging. It has a large field of view and exposure, which can increase production efficiency by 4 times compared to existing models; the TWINSCAN NXT:870B can produce more than 400 wafers per hour with the support of upgraded optical devices and the latest generation of maglev platforms.