ACLS

About ACLS

Axcelis Technologies, Inc. designs, manufactures and services ion implantation and other processing equipment used in the fabrication of semiconductor chips. The Company provides aftermarket lifecycle products and services, including used tools, spare parts, equipment upgrades, maintenance services and customer training. It offers a complete line of high energy, high current and medium current implanters for all application requirements. Its Purion systems are all based on a common platform, which enables a combination of implant purity, precision and productivity. Its Purion H, Purion Dragon and Purion H200 spot beam, high current systems cover all high current requirements. Its Purion XE and other Purion high energy system combines its radio frequency (RF) Linac high energy, spot beam technology with the Purion platform wafer handling system. It provides Purion M Si and SiC medium current system. Its Purion M systems also offer differentiated capabilities for specialty applications.